SHX

The SHX inline heater is designed to safely heat isopropyl alcohol (IPA) while meeting the highest cleanliness standards for next-generation semiconductor technologies. This high-performance heater features high-purity PTFE components, ensuring no contact with metals. It supports both recirculating and single-pass flow requirements, making it the ultimate solution for high-purity solvent heating. The SHX heater is ideal for semiconductor wafer cleaning, flammable solvent heating, and acid and corrosive chemical heating. Custom tool configurations and explosion-proof designs (SHX-EX) are available. Heats up to 194°F (90°C).

Applications

• Semiconductor Wafer Cleaning
• Flammable Solvent Heating
• Acid Heating and Corrosive Chemical Heating
• UltraHigh Purity Heating
• Chemical Heating