Soltan

The Soltan gas heater is designed to safely heat process gas through indirect contact, ensuring superior temperature stability even with changes in flow. Heated nitrogen or other clean gases reduce drying time and improve production times. Featuring 316 stainless steel wetted surfaces and a gas pathway through a stainless tube embedded in a cast aluminum heating block. The explosion-resistant cast aluminum electrical enclosure enhances safety. Redundant temperature sensors ensure safe operation. Ideal for wafer processing and various industrial applications.

Applications

• Wafer Processing