XC High-Flow

The XC High-Flow inline heat exchanger is designed for ultra-high purity (UHP) applications, offering the same superior heat transfer performance with a reduced fluid pressure drop. The PFA tube-side fluid path ensures it meets stringent cleanliness requirements necessary for next-generation semiconductor node technologies. This versatile heat exchanger supports both recirculating and single-pass flow applications, making it an ideal choice for high-demand processes. It can heat fluids up to 275°F (135°C).

Applications

• Semiconductor Wafer Cleaning